Towards alternative 3D nanofabrication in macroscopic working volumes
59. Ilmenau Scientific Colloquium. Technische Universität Ilmenau (Ilmenau, 11.-15.09.2017); 59. International Scientific Colloquium. Technische Universität Ilmenau (Ilmenau, 11.-15.09.2017); 59. Ilmenauer Wissenschaftliches Kolloquium. Technische Universität Ilmenau (Ilmenau, 11.-15.09.2017); 59. IWK. Technische Universität Ilmenau (Ilmenau, 11.-15.09.2017)
In: Measurement science and technology : devoted to the theory, practice and application of measurement in physics, chemistry, engineering and the environmental and life sciences from inception to commercial exploitation, Vol. 29 (2018), No. 11, 19 Seiten, Article 114002
2018Conference paper in JournalClosed Access
Technische Universität Ilmenau (1992-) » Department of Mechanical Engineering (1992-) » Institute for Process Measurement and Sensor Technology (1992-) » Fachgebiet Prozessmesstechnik (1993-)Technische Universität Ilmenau (1992-) » Department of Mechanical Engineering (1992-) » Institute for Process Measurement and Sensor Technology (1992-) » Fachgebiet Fertigungs- und Präzisionsmesstechnik (2015-)Technische Universität Ilmenau (1992-) » Department of Computer Science and Automation (1992-) » Institute for Automation and Systems Engineering (1992-) » Fachgebiet Regelungstechnik (2000-)Technische Universität Ilmenau (1992-) » Department of Mechanical Engineering (1992-) » Without Institute Allocation (1992-) » Fachgebiet Technische Optik (1992-)Technische Universität Ilmenau (1992-) » Department of Electrical Engineering and Information Technology (1992-) » Institute for Microelectronics and Nanoelectronics (2004-) » Fachgebiet Mikro- und nanoelektronische Systeme (2006-)
Title in English:
Towards alternative 3D nanofabrication in macroscopic working volumes
Conference
59. Ilmenau Scientific Colloquium. Technische Universität Ilmenau (Ilmenau, 11.-15.09.2017)
Conference
59. International Scientific Colloquium. Technische Universität Ilmenau (Ilmenau, 11.-15.09.2017)
Conference
59. Ilmenauer Wissenschaftliches Kolloquium. Technische Universität Ilmenau (Ilmenau, 11.-15.09.2017)
Conference
59. IWK. Technische Universität Ilmenau (Ilmenau, 11.-15.09.2017)
Author:
Kühnel, MichaelTU
- GND
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0000-0002-6060-7248
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0000-0002-6756-0008
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- GND
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- ORCID
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0000-0001-8031-4787
- ResearcherID
- FYD-0863-2022
- ResearcherID
- G-2469-2010
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Year of publication:
2018
Open-Access-Way of publication:
Closed Access
Scopus ID
PPN:
Language of text:
English
Title (abbreviated):
Meas. Sci. Technol.
Place of publication:
Bristol
Publisher:
IOP Publ.
Year of publication:
1990
in:
Vol. 29 (2018), No. 11, 19 Seiten, Article 114002
ISSN
ISSN
PPN:
PPN:
ZDB ID
ZDB ID
Language of text:
English
Media:
online resources
Type of resource:
Text
Peer Reviewed:
Yes
Part of statistic:
No
Keyword, Topic:
direct laser writing ; interference lithography ; nanofabrication ; nanoimprint ; nanopositioning and measuring machines ; scanning probe lithography ; two-photon polymerization
Media:
online resources
Type of resource:
Text
Access Rights:
restricted access
Peer Reviewed:
Yes
Part of statistic:
Yes